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Kwon, T.H., Michel, B. HARMST, High Aspect Ratio Micro Structure Technology Workshop, Gyenogju, Korea, 10–13 June 2005. Microsyst Technol 13, 207 (2007). https://doi.org/10.1007/s00542-006-0229-5
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DOI: https://doi.org/10.1007/s00542-006-0229-5