Abstract.
The influence of target morphology on the density of droplets and on thickness profiles was studied on thin bismuth films prepared by pulsed laser deposition. Films were deposited at room temperature on glass substrates from a Nd:YAG laser working at a wavelength of 532 nm. Two parameters were taken into account: the target diameter and the method of scanning the laser beam on the target. Three different laser beam scans have been simulated and tested afterwards. The quality of the films, as determined by scanning electron microscopy, can be improved by working with large targets and with appropriate scanning of the laser beam.
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Received: 21 July 1999 / Accepted: 11 September 1999 / Published online: 22 December 1999
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Jacquot, A., Lenoir, B., Boffoué, M. et al. Influence of target morphology on droplet emission and thickness profiles with pulsed laser deposited bismuth films . Appl Phys A 69 (Suppl 1), S195–S199 (1999). https://doi.org/10.1007/s003399900285
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DOI: https://doi.org/10.1007/s003399900285