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Electron energy distribution functions and rate and transport coefficients of H2/H/CH4 reactive plasmas for diamond film deposition

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Abstract

Electron energy distribution functions (eedf) and rate and transport coefficients for H2/H/CH4 mixtures have been calculated by solving a stationary Boltzmann equation as a function of reduced electric field E/N, of molar fraction, and of different concentrations of electronically excited states. Superelastic electronic collisions superimpose structures to eedf especially for E/N values < 40 Td.

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Authors and Affiliations

  1. Centro di Studio per la Chimica dei Plasmi del CNR and Dipartimento di Chimica dell'Università di Bari, Italy

    M. Capitelli & G. Colonna

  2. ZLIMHP, Université de Paris Nord-Villetaneuse, France

    K. Hassouni & A. Gicquel

Authors
  1. M. Capitelli
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  2. G. Colonna
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  3. K. Hassouni
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  4. A. Gicquel
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Capitelli, M., Colonna, G., Hassouni, K. et al. Electron energy distribution functions and rate and transport coefficients of H2/H/CH4 reactive plasmas for diamond film deposition. Plasma Chem Plasma Process 16, 153–171 (1996). https://doi.org/10.1007/BF01570175

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  • DOI: https://doi.org/10.1007/BF01570175

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