Abstract
Ceramic integration technology requires downsizing and/or improvement of device performance in many applications, such as in the fabrication of microelectromechanical systems, display devises, fuel cells, optical devices, and RF components. For these applications, realization of high-speed deposition rate, low process temperature, and fine patterning in ceramic coating are very important. The aerosol deposition (AD) method has many advantages for above requirements in comparison with conventional thin-film method or thermal spray coating technology. In this article, advantages of the AD method are highlighted by realizing a comparison with conventional thin-film methods and thermal spray technology. Challenges associated with AD method are also highlighted. At the end, examples of integration of AD method in the fabrication of electronic components are also given to show the easiness in usage and in integration of this method in the device process flow.
Similar content being viewed by others
References
P. Muralt, A. Kholkin, M. Kohli, T. Maeder, K.G. Brooks, R. Luthier: Fabrication and Characterization of PZT Thin Films for Micromotors, Integr. Ferroelectrics, 1995, 11, pp. 213-220
S. Akamine, T.R. Albrecht, M.J. Zdeblick, C.F. Quate: A Planar Process for Microfabrication of a Scanning Tunneling Microscope, Sens. Actuat. A, 1990, 23, pp. 964-970
T.-A. Massood, MICROACTUATORS: Electrical, Magnetic, Thermal, Optical, Mechanical, Chemical and Smart Structures, H.L. Tuller, Series Ed., Kluwer Academic Publishers, 1998
A. Manz, N. Graber, and H.M. Widmer, Miniaturized Total Chemical Analysis Systems: A Novel Concept for Chemical Sensing, Sens. Actuat. B, 1990, 1, p 244-248; P. Bergveld, Proc. Micro Total Analysis Systems Workshop μ-TAS’94, 1994, 1
S. Koganezawa, Y. Uematsu, T. Yamada, H. Nakano, J. Inoue, T. Suzuki: Dual-stage Actuator System for Magnetic Disk Drives Using a Shear Mode Piezoelectric Microactuator, IEEE Trans. Magn., 1999, 35(2), pp. 988-992
J. Akedo, M. Lebedev: Ceramics Coating Technology based on Impact Adhesion Phenomenon with Ultrafine Particles—Aerosol Deposition Method for High Speed Coating at Low Temperature, Materia, 2002, 41(7), pp. 459-466 (in Japanese)
M. Sayer, K. Sreenivas: Ceramic Thin Films: Fabrication and Applications, Science, 1990, 247, pp.1056-1060
I.R. Abothu, Y. Ito, P. Poosanaas, S. Kalpat, S. Komarneni, K. Uchino: Sol-gel Processing of Piezoelectric Thin Films, Ferroelectrics, 1999, 232, pp. 191-195
H.D. Chen, K.R. Udayakumar, C.J. Gaskey, L.E. Cross, J.J. Bernstein, L.C. Niles: Fabrication and Electrical Properties of Lead Zirconate Titanate Thick Films, J. Am. Ceram. Soc., 1996, 79, pp. 2189-2192
Ph. Luginbuhl, G.-A. Racine, Ph. Lerch, B. Romanowicz, K.G. Brooks, N.F. de Rooij, Ph. Renaud, N. Setter: Piezoelectric Cantilever Beams Actuated by PZT Sol-gel Thin Film, Sens. Actuat. A, 1996, 54, pp. 530-535
S.Watanabe, T. Fujiu, T. Fujii: Effect of Poling on Piezoelectric Properties of Lead Zirconate Titanate Thin Films Formed by Sputtering, Appl. Phys. Lett., 1995, 66, pp. 1481-1483
M. Sakata, S. Wakabayashi, M. Ikeda, H. Goto, M. Takeuchi, T. Yada: Pb-Based Ferroelectric Thin Film Actuator for Optical Applications, J. Microsyst. Technol., 1995, 2, pp. 26-31
Y. Sakashita, T. Ono, H. Segawa, K. Tominaga, M. Okada: Preparation and Electrical Properties of MOCVD-deposited PZT Thin Films, J. Appl. Phys., 1991, 69, pp. 8352-8357
H. Kidoh, T. Ogawa, A. Morimoto, T. Shimizu: Ferroelectric Properties of Lead-zirconate-titanate Films Prepared by Laser Ablation, Appl. Phys. Lett., 1991, 58(25), pp. 2910-2912
M. Oikawa, K. Toda: Preparation of Pb(Zr,Ti)O3 Thin Films by an Electron Beam Evaporation Technique, Appl. Phys. Lett., 1976, 29(8), pp. 491-492
R.N. Castellano, L.G. Feinstein: Ion-beam Deposition of Thin Films of Ferroelectric Lead Zirconate Titanate (PZT), J. Appl. Phys., 1979, 50(6), pp. 4406-4411
Y. Ohba, M. Miyauchi, T. Tsurumi, M. Daimon: Analysis of Bending Displacement of Lead Zirconate Titanate Thin Film Synthesized by Hydrothermal Method, Jpn. J. Appl. Phys., 1993, 32, pp. 4095-4098
K. Shimomura, T. Tsurumi, Y. Ohba, M. Daimon: Preparation of Lead Zirconate Titanate Thin Film by Hydrothermal Method, Jpn. J. Appl. Phys., 1997, 30, pp. 2174-2177
B. Morten, G. De Cicco, A. Gandolfi, C. Tonelli, PZT-based Thick Films and the Development of a Piezoelectric Pressure Sensor, Hybrid Circ., 1992, 28, pp.25-28
H.D. Chen, K.R. Udayakumar, L.E. Cross, J.J. Bernstein, L.C. Niles: Dielectric, Ferroelectric, and Piezoelectric Properties of Lead Zirconate Titanate Thick Films on Silicon Substrates, J. Appl. Phys., 1995, 77, pp. 3349-3353
Y. Akiyama, K. Yamanaka, E. Fujisawa, Y. Kowata: Development of Lead Zirconate Titanate Family Thick Films on Various Substrates, Jpn. J. Appl. Phys., 1999, 38, pp. 5524-5527
C.V.R. Vasant Kumar, M. Sayer, R. Pascual, D.T. Amm, Z. Wu: Lead Zirconate Titanate Films by Rapid Thermal Processing, Appl. Phys. Lett., 1991, 58(11), 1991, pp. 1161-1163
M.R. Poor, C.B. Fledderman: Measurements of Etch Rate and Film Stoichiometry Variations During Plasma Etching of Lead-Lanthanum-Zirconium-Titanate Thin Films, J. Appl. Phys., 1991, 70, pp. 3385-3387.
C.W. Chung: Reactive Ion Etching of Pb(Zr x Ti1−x )O3 Thin Films in an Inductively Coupled Plasma, J. Vac. Sci. Technol. B, 1998, 16, pp. 1894-1900
X. Li, T. Abe, and M. Esashi: Deep Reactive Ion Etching of Pyrex Glass, Proc. IEEE MEMS’2000, 2000, pp 271 (Miyazaki, Japan)
K. Saito, J.H. Choi, T. Fukuda, M. Ohue: Reactive Ion Etching of Sputtered PbZr1−x Ti x O3 Thin Films, Jpn. J. Appl. Phys., 1992, 31, pp L1260-L1262
J. Akedo: Aerosol Deposition Method for Fabrication of Nano Crystal Ceramic Layer- Novel Ceramics Coating with Collision of Fine Powder at Room Temperature, Mater. Sci. Form, 2004, 449-452, pp 43-48
J. Akedo, M. Lebedev, Microstructure and Electrical Properties of Lead Zirconate Titanate (Pb(Zr52/Ti48)03) Thick Film Deposited with Aerosol Deposition Method, Jpn. J. Appl. Phys., 1999, 38(9B), pp 5397-5401
J. Akedo, Aerosol Deposition of Ceramic Thick Films at Room Temperature—Densification Mechanism of Ceramic Layer, J. Am. Ceram. Soc., 2006, 89(6), pp 1834-1839
M. Kiyohara, Y. Tsujimichi, K. Mori, H. Hatono, J. Migita, T. Kusunoki, N. Minami, M. Lebedev, and J. Akedo, Proc. of 15th Ceram. Soc. Jpn. Autumn Symp., 228, 2002
M. Levedev, J. Akedo, K. Mori, T. Eiju: Simple Self-Selective Method of Velocity Measurement for Particles in Impact-Based Deposition, J. Vac. Sci. Tech. A, 2000, 18(2), pp 563-566
J. Akedo, M. Lebedev: Influence of Carrier Gas Conditions on Electrical and Optical Properties of Pb(Zr,Ti)O3 Thin Films Prepared by Aerosol Deposition Method, Jpn. J. Appl. Phys., 2001, 40, pp 5528-5532
G.R. Johnson, T.J. Holmquist, An Improved Computational Constitutive Model for Brittle Materials, High Pressure Science and Technology - 1993, Vol. 2, Edited by S.C. Schmidt, J.W. Shaner, G.A. Samara, M. Ross, AIP Press, New York, 1994, pp 981-984
T.J. Holmquist, G.R. Johnson, D.E. Grady, C.M. Lopatin, and E.S. Hertel, High Strain Rate Properties and Constitutive Modeling of Glass, Proceedings of 15th International Symposium on Ballistics, May 21-24, 1995, pp 237-244 (TB31, Jerusalem, Israel)
C.E. Anderson, G.R. Johnson, and T.J. Holmquist, Ballistic Experiments and Computations of Confined 99.5% Al2O3 Ceramic Tiles, Proceedings of 15th International Symposium on Ballistics, May 21-24, 1995, pp 65-72 (G6, Jerusalem, Israel)
H. Hirai, K. Kondo: Shock-Compacted Si3N4 Nanocrystalline Ceramics: Mechanisms of Consolidation and of Transition from α- to β-form, J. Am. Ceram. Soc., 1994, 77, pp 487-492
J.J. Petrovic, B.W. Olinger, R.B. Roof: Explosive Shock Loading on Alpha-Si3N4 Powder, J. Mater. Sci., 1985, 20, pp 391-398
M. Yoshida, H. Ogiso, S. Nakano, and J. Akedo, Compression Test System for a Single Submicron Particle, Rev. Sci. Instr., 2005, 76, e-093905-1-5
R.C. Dykhuizen, M.F. Smith, D.L. Gilmore, R.A. Neiser, X. Jiang, S. Sampath: Impact of High Velocity Cold Spray Particle, J. Thermal Spray Technol., 1999, 8, pp 559-564
J. Vlcek, H. Huber, and H. Voggenreiter, Kinetic Powder Compaction Applying the Cold Spray Process—A Study on Parameter, Proc. of ITSC2001, 417, 2001
L. Scudiero, J.T. Dickinson, Y. Enomoto: The Electrification of Flowing Gases by Mechanical Abrasion of Mineral Surfaces, Phys. Chem. Minerals, 1998, 25, pp 566-573
J. Akedo, M. Lebedev: Powder Preparation for Lead Zirconate Titanate Thick Films in Aerosol Deposition Method, Jpn. J. Appl. Phys., 2002, 41, pp 6980-6984
M. Lebedev, J. Akedo: Patterning Properties of Lead Zirconate Titanate (PZT) Thick Films Made by Aerosol Deposition, IEEJ Trans. Sens. Micromach., 2000, 120-E (12), pp 600-601
J. Akedo: Study on Rapid Micro-structuring using Jet-molding: Present Status and Structuring Subjects Toward HARMST, Microsyst.Technol., 2000, 6 (11), pp 205-209
T. Ide, Y. Mori, N. Ikawa, H. Yagi, The Film Formation Method Using Hypervelocity Microparticle Impact by Electrostatic Acceleration (1st Report)—Electrodynamic Behavior of Ultra-Fine Particles during Film Growth, J. Jpn. Soc. Prec. Eng., 1991, 57, pp 122-127 (in Japanese)
F. Fukuzawa: Micro Particle Ion Beam (Macron Beam), Oyo Buturi, 1991, 60 (7), pp 720-721 (in Japanese)
P. Alkimov, V.F. Kosarev, A.N. Papyrin: A Method of Cold Gas-Dynamic Deposition, Dokl. Akad. Nauk SSSR, 1990, 315(5), pp 1062-1065
C. Hayashi, S. Kashu, M. Oda, F. Naruse: The Use of Nanoparticles as Coatings, Mater. Sci. Eng. A, 1993, 163, pp 157-161
T. Ide, Y. Mori, I. Konda, N. Ikawa, H. Yagi: The Film Formation Method Using Hypervelocity Microparticle Impact by Electrostatic Acceleration (2nd Report)—Preparation of Diamond-like Carbon Film, J. Jpn. Soc. Prec. Eng., 1991, 57, pp 143-148 (in Japanese)
C. Hayahi: Ultrafine Particles, J. Vac. Sci. Technol. A, 1987, 5(4), pp 1375-1384
N.P. Rao, N. Tymiak, J. Blum, A. Neuman, H.J. Lee, S.L. Girshick, P.H. McMurry, J. Heberlein: Hypersonic Plasma Particle Deposition of Nanostructured Silicon and Silicon Carbide , J. Aerosol. Sci., 1998, 29, pp707-720
E. Barborini, P. Piseri, A. Podesta, P. Milani: Cluster Beam Microfabrication of Pattern of Three-dimensional Nanostructured Objects, Appl. Phys. Lett., 2000, 77, pp 1059-1061
J. Akedo, M. Kiyohara: Nanostructuring and Shock Compaction using Fine Particle Beam—Aeorsol Deposition for Forming of Nanocrystal Layer and Powder Technology, J. Soc. Powder Tech., 2006, 43(5), pp 376-384 (in Japanese)
S.-M. Nam, M. Momotani, N. Mori, H. Kakemoto, S. Wada, J. Akedo, T. Tsurumi: Microstrip Band Pass Filter of GHz Region Employing Aerosol-Deposited Alumina Thick Films, Integr. Ferroelectr., 2004, 66, pp 301-310
J. Akedo, Aerosol Deposition for Coating of Transparent and High Resistive Ceramic Layer, Metal AGNE Gijutsu Center, 2005, 75(3), pp 16-23 (in Japanese)
J. Akedo, M. Lebedev: Piezoelectric Properties and Poling Effect of Pb(Zr,Ti)O3 Thick Films Prepared for Microactuators by Aerosol Deposition, Appl. Phys. Lett., 2000, 77(11), pp 1710-1712
J. Akedo, M. Lebedev: Effects of Annealing and Poling Conditions on Piezoelectric Properties of Pb(Zr0.52,Ti0.48)O3 Thick Films Formed by Aerosol Deposition Method, J. Cryst. Growth, 2002, 235, pp 397-402
Y. Kawakami, J. Akedo: Annealing Effect on 0.5Pb(Ni1/3Nb2/3)O3-0.5Pb(Zr0.3Ti0.7)O3 Thick Film Deposited By Aerosol Deposition Method, Jpn. J. Appl. Phys., 2005, 44, pp 6934-6937
N. Asai, R. Matsuda, M. Watanabe, H. Takayama, S. Yamada, A. Mase, M. Shikida, K. Sato, M. Lebedev, and J. Akedo, A Novel High Resolution Optical Scanner Actuated by Aerosol Deposited PZT Films. Proc. of MEMS 2003, 2003, p 247-250 (Kyoto, Japan)
J. Akedo, M. Lebedev, H. Sato, J.H. Park, High-Speed Optical Microscanner Driven with Resonation of Lamb Waves Using Pb(Zr,Ti)O3 Thick Films Formed by Aerosol Deposition, Jpn. J. Appl. Phys., 2005, 44, pp 7072-7077
H. Takagi, M. Mizoguchi, J.H. Park, K. Nishimura, H. Uchida, M. Lebedev, J. Akedo, M. Inoue: PZT-Driven Micromagnetic Optical Devices, Mat. Res. Soc. Symp. Proc., 785, p D6.10.1-D6.10.6., 2004
Nanotech2007 NEDO project on “Nanostructure Forming for Advanced Ceramic Integration Technology in Japan: Nanotechnology Program” Pamphlet, 2/21, 2007
Y. Imanaka and J. Akedo, Integrated RF Module Produced by Aerosol Deposition Method, Proceedings of the 54th Electronic Components and Technology Conference (ECTC), 2004, p 1614-1620
S.-M. Nam, H. Yabe, H. Kakemoto, S. Wada, T. Tsurumi, J. Akedo: Low Temperature Fabrication of BaTiO3 Thick Films by Aerosol Deposition Method and Their Electric Properties, Trans MRS Jpn., 2004, 29 (4), pp 1215-1218
S. Sugimoto K. Haga, M. Nakada, T. Kagotani, K. Inomata, and J. Akedo “Magnetic Properties of Fe/(NiZnCu)Fe2O4 Composite Films Prepared by Aerosol Deposition Method,” INTERMAG 2005, 2005, Nagoya, Japan, April 4-8, EC-04
M. Nakada, K. Ohashi, J. Akedo: Optical and Electro-optical Properties of Pb(Zr,Ti)O3 and (Pb,La)(Zr,Ti)O3 Films Prepared by Aerosol Deposition Method, J. Cryst. Growth, 2005, 275, pp e1275-1280
M. Nakada, K. Ohashi, M. Lebedev, J. Akedo: Electro-Optic Properties of Pb(Zr1 − xTix)O3 (X = 0, 0.3, 0.6) Films Prepared by Aerosol Deposition, Jpn. J. Appl. Phys., 2005, 44, pp L1088-L1090
M. Iwanami, M. Nakada, H. Tsuda, K. Ohashi, J. Akedo: Ultra Small Electro-optic Field Probe Fabricated by Aerosol Deposition, IEICE Electro. Express, 2007, 4 (2), pp 26-32
Acknowledgments
The author is very grateful to Dr. M. Lebedev, to his laboratory’s colleagues and to NEDO project members for their collaboration research. This research was supported in part by the NEDO Project on “Nanostructure Forming for Advanced Ceramic Integration Technology in Japan: Nanotechnology Program.”
Author information
Authors and Affiliations
Corresponding author
Rights and permissions
About this article
Cite this article
Akedo, J. Room Temperature Impact Consolidation (RTIC) of Fine Ceramic Powder by Aerosol Deposition Method and Applications to Microdevices. J Therm Spray Tech 17, 181–198 (2008). https://doi.org/10.1007/s11666-008-9163-7
Received:
Revised:
Accepted:
Published:
Issue Date:
DOI: https://doi.org/10.1007/s11666-008-9163-7