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Fabrication of rigid stamp on a cylindrical substrate using hydrogen silsesquioxane/ZrO2 nanoparticle composite material for roll-to-roll nanoimprinting process

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Abstract

In this study, a hydrogen silsesquioxane (HSQ) and zirconium oxide (ZrO2, zirconia) nanoparticle composite was used for a nanopatterned roll stamp fabricated using the direct printing technique. HSQ, referred as a spin on glass (SOG) material have been used for direct printing process with polydimethylsiloxane mold. In order to enhance mechanical properties of SOG material without losing printable property, ZrO2 nanoparticles were dispersed with HSQ solution. After direct printing process of composite material, annealing process was done to convert polymeric HSQ structure into SiO2 in order to enhance mechanical properties. We evaluate the chemical, optical and mechanical properties of the HSQ/ZrO2 composite by FT-IR, a refractive index measurement, a nanoindentation test and a pencil adhesion test. At the mechanical property tests, the composite material shows a high hardness value and good adhesion properties with glass substrate. Considering the composite material properties, it is suitable for use as a master cylindrical stamp in a roll-to-roll process.

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Acknowledgments

This research was supported by the R&D program for Industrial Core Technology through the Korea Evaluation Institute of Industrial Technology supported by the Ministry of Knowledge Economy in Korea (Grant No. 10040225) and the Pioneer Research Center Program through the National Research Foundation of Korea funded by the Ministry of Science, ICT & Future Planning (NRF-2013M3C1A3063597).

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Authors and Affiliations

  1. Department of Materials Science and Engineering, Korea University, Seongbuk-gu, Anam-ro 145, Seoul, 136-701, Republic of Korea

    Sang-Woo Ryu, Hak-Jong Choi, Soyoung Choo, Chae-Hyun Kim & Heon Lee

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  1. Sang-Woo Ryu
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  2. Hak-Jong Choi
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  3. Soyoung Choo
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  4. Chae-Hyun Kim
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  5. Heon Lee
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Correspondence to Heon Lee.

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Ryu, SW., Choi, HJ., Choo, S. et al. Fabrication of rigid stamp on a cylindrical substrate using hydrogen silsesquioxane/ZrO2 nanoparticle composite material for roll-to-roll nanoimprinting process. J Sol-Gel Sci Technol 73, 628–633 (2015). https://doi.org/10.1007/s10971-014-3571-6

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  • DOI: https://doi.org/10.1007/s10971-014-3571-6

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