Abstract
A method of determining the micro-cantilever residual stress gradients by studying its deflection and curvature is presented. The stress gradients contribute to both axial load and bending moment, which, in prebuckling regime, cause the structural stiffness change and curving up/down, respectively. As the axial load corresponds to the even polynomial terms of stress gradients and bending moment corresponds to the the odd polynomial terms, the deflection itself is not enough to determine the axial load and bending moment. Curvature together with the deflection can uniquely determine these two parameters. Both linear analysis and nonlinear analysis of micro-cantilever deflection under axial load and bending moment are presented. Because of the stiffening effect due to the nonlinearity of (large) deformation, the difference between linear and nonlinear analyses enlarges as the micro-cantilever deflection increases. The model developed in this paper determines the resultant axial load and bending moment due to the stress gradients. Under proper assumptions, the stress gradients profile is obtained through the resultant axial load and bending moment.
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Acknowledgements
The supports from the Distinguished Young Scholar Fund of National Natural Science Foundation of China (NSFC, Grant No. 10225209), the key project from Chinese Academy of Sciences (Grant No. KJCX-SW-L2) and the NSF-RGC joint project (Grant No. 50131160739) are greatly appreciated.
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Zhang, Y., Zhao, Yp. An effective method of determining the residual stress gradients in a micro-cantilever. Microsyst Technol 12, 357–364 (2006). https://doi.org/10.1007/s00542-005-0065-z
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DOI: https://doi.org/10.1007/s00542-005-0065-z